- Created: 09-16-20
- Last Login: 09-16-20
Hexafluoroethane is used
鈼?nbsp;as a propellant.
鈼?nbsp;as a gaseous insulator.
鈼?nbsp;in electrical and electronic equipment as a gaseous dielectric.
鈼?nbsp;for dry etching of silicon dioxide and for stripping photoresist.
鈼?nbsp;as a refrigerant in certain low temperature applications and as a component in some refrigerant blends.
鈼?nbsp;as a raw material for the production of monomers, as well as in chemical reactions requiring the introduction of fluorine atoms in other molecules.
Hexafluoroethane may be obtained as a by-product of CFC production, or by direct fluorination of ethane.
Emergency MeasuresElectronic Specialty Gas